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101.
厚胶光刻非线性畸变的校正 总被引:3,自引:0,他引:3
利用厚胶光刻技术制作大深度微结构元件是一种有效的途径,但厚胶光刻过程中的非线性畸变对光刻面形质量的严重影响限制了该技术的应用,基于此,提出了一种对掩模透射率函数进行校正的方法。分析空间像形成及其在光刻胶内传递、曝光、显影等过程中非线性因素的影响,利用模拟退火算法对掩模透射率函数进行校正,以提高光刻面形质量,并以凹面柱透镜为例,给出了校正前后的显影轮廓模拟结果,其校正后浮雕面形的体积偏差仅为2.63%。该方法在有效改善面形质量的同时,并没有引起掩模的设计、制作难度及费用增加,这对于设计、制作高质量的微结构元件有重要意义。 相似文献
102.
矩孔金属光栅矢量模式理论的数值计算 总被引:1,自引:0,他引:1
根据矩孔金属光栅的矢量模式理论,计算了不同入射方向,波长及偏振态情况下衍射场的分布,研究了不同光栅结构对衍射效率,偏振态变化的影响;同时,根据实际需要,加工制作了一批不同深度的矩孔光栅样品,进行了实验测量,并将计算值与实验值进行了比较,两者基本相符。 相似文献
103.
C.X. Gao F.C. Yu S.Y. Jeong A.R. Choi P. Parchinskiy D.J. Kim H.J. Kim Y.E. Ihm C.G. Kim C.S. Kim 《Journal of magnetism and magnetic materials》2006
GaMnN and Be-codoped GaMnN were grown via molecular beam epitaxy using a single GaN precursor and their structural and magnetic properties were examined. X-ray diffraction and superconducting quantum interference device (SQUID) measurements revealed that the grown layers are homogeneous without precipitates. The saturation magnetization of GaMnN has increased from ∼4 to ∼16 emu/cm3 via codoping of Be. The d–d exchange interaction between Mn atoms was discussed for the ferromagnetism of GaMnN. 相似文献
104.
An economical magnetocardiogram (MCG) system is built in our laboratory. It mainly consists of a MCG data acquisition stage equipped with two high-To superconducting quantum interference device (SQUID) magnetometers, a data processing stage with digital filtering and a one-layer μ-metal magnetically shielded room in conjunction with a high-Tc SQUID based active compensation. Experimental results show that a noise level of pico-tesla in MCG profiles, which is necessary for clinical applications, may be achieved with the system. Moreover, stable and convenient operations of the system are demonstrated with simulating MCG measurements. 相似文献
105.
106.
The effect of γ-ray irradiation on the magnetic properties of NdFeB and Fe–Cr–Co permanent magnets has been investigated. The magnetic flux loss of two kinds of magnets before and after irradiation was measured. Results show that the effect of γ-ray irradiation on the magnetic properties of sintered NdFeB is not so obvious as that on Fe–Cr–Co magnet. Irradiation-induced damage from γ-ray for the Fe–Cr–Co magnets was characterized for the first time. The decline of permanent magnetic properties of Fe–Cr–Co magnet induced by γ-ray irradiation is reversible except for the maximum energy product (BH)max. The difference of coercivity mechanism between these two kinds of permanent magnets is responsible for the different dependence of magnetic properties loss induced by γ-ray irradiation. 相似文献
107.
Urn模型的离散概率分布被用于构造逼近格式,具有Bernstein多项式的许多特性。本文用B网技术对Urn模型概率分布给出新的解释,指出了Urn模型B网的诸多性质,导出分布函数曲线的导数公式,构造了Urn分布的对偶基及与此相关的拟插值算子。 相似文献
108.
本文将文献[9]提出改进的通量分裂方法,应用于随时间变化的贴体网格中,建立了可用于求解非定常Euler方程的通量分裂方法.该方法是以连续的特征值分离为基础,它具有方法简单,便于推广使用的特点.同时克服了Steger-Warming通量分裂方法存在的问题.对通量分裂后的Euler方程.利用MUSCL型迎风差分建立了具有二阶精度的有限体积方程.文中以NACA64A—10翼型为例,对其在跨音速流场中进行沉浮、俯仰及带有振动控制面引起的非定常气动载荷进行了计算.部分计算结果与相应的实验结果进行了比较,吻合良好 相似文献
109.
X. Y. Yang H. C. Gao X. L. Tan H. Z. Yuan G. Z. Cheng S. Z. Mao S. Zhao L. Zhang J. Y. An J. Y. Yu Y. R. Du 《Colloid and polymer science》2004,282(3):280-286
1H chemical shift changes of sodium 4-decyl naphthalene sulfonate (SDNS) at 313 K show that its critical micellar concentration lies between 0.82 and 0.92 mmol/dm3, which is in the same range as that of the previous study at 298 K. The spin–lattice relaxation time, spin–spin relaxation time and two-dimensional nuclear Overhauser enhancement spectroscopy experiments give information about the structure of the SDNS micelle and the dynamics of the molecules in the micelle. The size of the SDNS micelle remains almost unchanged in the temperature range from 298 to 313 K as deduced by analyzing the self-diffusion coefficient. Special arrangement of the naphthyl rings of SDNS in the micelles affects the packing of these hydrophobic chains. The methylene groups of the alkyl chain nearest the naphthalene groups penetrate into the aromatic region, which results in a more tightly packed hydrophobic micellar core than that of sodium dodecyl sulfonate. 相似文献
110.
A method has been described for the determination of arsenic species (arsenite and arsenate) by hydride generation-atomic fluorescence spectrometry (HG-AFS). The experimental conditions that influence the fluorescence intensity and the reduction of arsenic were investigated and optimized, and the influences from foreign ions and their elimination were studied. The detection limit was found to be 79.7 ng L(-1). The proposed method was applied to the determination of arsenic species in water leachate of traditional Chinese medicines with a recovery range of 91.1-109.5%. 相似文献